Rotating Stage (Fine Adjustment Type)

Table Size (Range Selectable)

Load Capacity (Range Selectable)

(N)

Travel Distance (Fine)

(deg)

Feeding Method

Table Size (Thickness) H (Range Selectable)

(mm)

Table Size (Dia.) D

(Ø)

Allowable Load

(N)

Table Size (Thickness) H

(mm)

Table Parallelism

(µm)

Micrometer Head Position

Feed method (micrometer type)

Feed method (feed screw type)

Feed pitch

(mm)