SMC Vacuum Valves（Type：Vacuum operation vacuum valves）

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XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types

SMC

A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.

2D / 3D CAD data available

Starting from^∗ ：	520.09 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

SMC

A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

2D / 3D CAD data available

Starting from^∗ ：	884.79 €
Min. Shipping Days ：	22 Days

*Unit price with basic configuration

XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal

SMC

Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.

2D / 3D CAD data available

Starting from^∗ ：	437.59 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

ZP2V, Vacuum Saving Valve

SMC

A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.

2D / 3D CAD data available

Starting from^∗ ：	12.45 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration


Brand
Product Series
CAD
Starting from^∗
Min. Shipping Days ：
Type
Application
Installation method
Number of Ports
Types of solenoid
Switching Type
Electromagnetic valve drive type
Effective Sectional Area(mm2)
Pipe Port Type
Nominal Pipe Thread Size
Connection tube diameter
Flange Type
Flange Calls
Cv Value


Brand	SMC	SMC	SMC	SMC
Product Series	XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types	Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series	XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal	ZP2V, Vacuum Saving Valve
CAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D
Starting from^∗	520.09 € *Unit price with basic configuration	884.79 € *Unit price with basic configuration	437.59 € *Unit price with basic configuration	12.45 € *Unit price with basic configuration
Min. Shipping Days ：	4 Days	22 Days	4 Days	4 Days
Type	Vacuum operation vacuum valves	Vacuum operation vacuum valves	Vacuum operation vacuum valves	Vacuum operation vacuum valves
Application	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating
Installation method	Direct	Direct	Direct	Direct
Number of Ports	2-port valve	2-port valve	3-port valve	2-port valve
Types of solenoid	-	-	Single	-
Switching Type	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed
Electromagnetic valve drive type	-	-	-	-
Effective Sectional Area(mm2)	-	-	-	0.07 ～ 0.78
Pipe Port Type	Flange	Flange	Flange	M / Rc / NPT / Single-Action Pipe
Nominal Pipe Thread Size	-	-	-	M5 / 1/8 / M6 / M8
Connection tube diameter	-	-	-	Ø4 / Ø6
Flange Type	NW / Other	KF	NW / Other	-
Flange Calls	16 / 25 / 40 / 50 / 63	25 / 40	16 / 25 / 40 / 63	-
Cv Value	-	-	-	0.0037940379 ～ 0.0422764228